The Ti 2p1/2 peak for each species is constrained to be at a fixed energy above the Ti 2p3/2 peak. This removes the uncertainty associated with charge correcting to adventitious C especially in situations where the adventitious overlayer is not in good electrical contact with the titanium containing species underneath. Although C 1s set to 284.8 eV can be used as an internal charge correction it is also possible in this case to use the Ti 2p3/2 metal peak set at 453.7 eV or the clearly defined Ti(IV) (TiO2) 2p3/2 peak set at 458.6 eV. An example of the use of these parameters is presented for a mixed oxidation state titanium-containing sample in Figure 1. As well, data from readily available standard samples (metal, TiO2) were used to clarify the peak-widths, splitting (Δ=6.05 eV for Ti(0), Δ=5.72 eV for Ti(IV)) and shapes (asymmetric for the metallic component) (Table 2). Initial fitting parameters for the titanium 2p peak were developed using averaged binding energy (BE) data and 2p1/2 – 2p3/2 splitting data from the NIST XPS Database (Table 1).
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